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  • VARIAN | TV301 Pump Specification

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    Writer 혜성테크놀… Date20-06-30 09:36 View 2,112 Comment0

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    VARIAN

    TV301 Pump Specification


    Parameter TV301
    Pumping speed
    With CFF 8" or ISO 160 With CFF 6" or ISO 100
    N₂ 280 l/s 250 l/s
    He 230 l/s 220 l/s 
    H₂ 210 l/s 200 l/s
    Compression ratio N₂ >2 x 10⁸
    He 1 x 10⁵
    H₂ 2 x 10⁴
    Base pressure
    (with recommended forepump)
    mechanical: < 2 x 10¹⁰ mbar (< 1.5 x 10¹⁰ Torr)
    Inlet flange CFF 8" O.D.    ISO 160
    CFF 6" O.D.    ISO 100
    Foreline flange KF16 NW (KF25 – optional)
    Rotational speed 56,000 rpm 
    Start-up time < 3 minutes
    Recommended forepump mechanical: Agilent DS 102
    mechanical: Agilent DS 302
    dry pump: Agilent SH 110
    Operating position Any
    Cooling requirements Natural air convection, Forced air or water optional
    Operating ambient temperature + 5° C to + 35° C
    Cooling water flow: 200 l/h (0.89 GPM)
    temperature: + 10° C to + 30° C
    pressure: 3 to 5 bar (45 to 75 Psi)
    Bakeout temperature 120° C at inlet flange max.(CF flange)
    80° C at inlet flange max.(ISO flange)
    Noise level ≤ 45 dB (A) at 1 meter
    Pwr supply (mains) Input voltage 100 - 240 Vac
    Input freq. 50 - 60 Hz
    Max input pwr 300 VA
    Stand-by pwr 10 W
    Max oper. power 150 W with water or air cooling
    Protection fuse 4 A
    [이 게시물은 혜성테크놀…님에 의해 2020-07-02 09:48:07 specification에서 복사 됨]
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