EDWARDS | STP-H2001 Pump Specification
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EDWARDS
STP-H2001 Pump Specification
| Parameter | STP-H2001 Series | |||
|---|---|---|---|---|
| Flange size |
Inlet port flange | VG250/ISO250F/ICF305 | ||
| Outlet port flange | KF40 | |||
| Pumping speed (L/s) |
N₂ | 2100 | ||
| He | 1850 | |||
| H₂ | 1550 | |||
| Compression ratio | N₂ | >10 ⁸ | ||
| H₂ | 2.5×10 ⁵ | |||
| H₂ | 10 ⁴ | |||
| Ultimate pressure | 10⁻⁷(10⁻⁹) order (after baking) Pa | |||
| Maximum working pressure | 5 (0.038) Pa (SCCM) : Water cooling / TMS unit used | |||
| Allowable outlet port pressure | 270 (2) Pa (Torr)：Water cooling / TMS unit used | |||
| Rated speed | 27,000 rpm | |||
| Starting time | 7 min | |||
| Stopping time | 8 min | |||
| Noise | < 50 (at 27,000rpm) dB | |||
| Baking temperature | < 120 °C | |||
| Lubricating oil | Not necessary | |||
| Installation position | Vertical | |||
| Cooling method |
Water cooling | |||
| Emergency vent. valve | No | |||
| Cooling pipe material | Stainless steel | |||
| Backing pump | >540 L/min | |||
| Mass | 60 kg | |||
| Ambient temperature range | 0 to 40 °C | |||
| Storage temperature range | - 25 to + 55 °C | |||
