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  • ADIXEN | ATH1600M/MT Pump Specification

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    Writer 혜성테크놀… Date20-06-19 10:04 View 1,717 Comment0

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    ADIXEN(ALCATEL)

    ATH1600M/MT Pump Specification


    Parameter ATH1600M/MT
    Flange, DN 200 ISO-K
    200 CF-F
    250 ISO-K
    250 CF-F
    Maximum rotation speed, rpm 39,000
    Standby speed, rpm 15000 to 39000
    Pumping speed, l/s N₂ 1400  1500
    He 1150  1150
    H₂ 750  750
    Compression rate H2 6 · 10⁷
    He 8 · 10³
    N2 3 · 10²
    Ultimate pressure without purge, meas.
    according to Pneurop standard,
    mTorr/mbar
    4.5 * 10⁻ / 6 * 10
    Maximum pressure at inlet
    in continuous operation, mbar
    0.2
    Maximum permissible
    pressure at exhaust, mbar
    1.5
    Maximum flowrate with N2 (heated),
    SCCM
    1000
    Maximum flowrate with N2 (unheated),
    SCCM
    2500
    Purging maximum flow rate,
    SCCM
    50
    Pressure with 100 SCCM flow,
    mTorr/mbar
    0.95 / 1.46x10³
    Pressure with 200 SCCM flow,
    mTorr/mbar
    1.92 / 3.0x10³
    Vibration level at maximal speed, μm < 0.01
    Mounting orientation Any
    Power supply required
    for heater band (MT)
    100-120 V - 50/60 Hz
    200-240 V - 50/60 Hz
    135 W
    Start-up time, min < 6
    Maximum start-up power, W 650
    Maximum operating power, W 300
    Cooling water flow rate, l/h < 60
    Water temperature, °C 15 < T < 25
    Maximum ambient temperature, °C 40
    Weight (DN 160 ISO-K model), kg (lb) 35.5 (78.8)
    Recommended forepump ADP / ADS
    [이 게시물은 혜성테크놀…님에 의해 2020-06-25 17:22:50 specification에서 복사 됨]
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