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  • EBARA | ET600W Pump Specification

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    Writer 혜성테크놀… Date20-06-19 09:41 View 1,484 Comment0

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    EBARA

    ET600W Pump Specification


    Parameter ET600W 
    Pumping speed N2 600 l/s
    H2 220 l/s
    Ultimate pressure N2 > 109
    H2 5 x 103
    Ultimate pressure 10-7 order Pa
    Allowable outlet pressure 400 Pa
    Flange standard Inlet side VG150
    Outlet size KF40
    Run-up time in vacuum  8 min
    Revolution 35,000
    Installation position Any
    Vibration level (at rated speeds) < 0.01 µm (0-P)
    Cooling system Water cooling
    Cooling water flow rate > 2 L/min
    Cooling water temperature < 25 °C (77 °F)
    Weight of pump 35kg (77lb)
    [이 게시물은 혜성테크놀…님에 의해 2020-06-25 17:22:33 specification에서 복사 됨]
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