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  • PFEIFFER | HiPace300 Pump Specification

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    Writer 혜성테크놀… Date20-06-25 15:09 View 1,627 Comment0

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    PFEIFFER HiPace300 Pump Specification

    Parameter HiPace 300
    Flange (in) DN 100 ISO-K DN 100 CF-F DN 100 ISO-F
    Flange (out) DN 16 ISO-KF DN 16 ISO-KF DN 16 ISO-KF
    Pumping speed for Ar 255 l/s
    Pumping speed for CF₄ 200 l/s
    Pumping speed for H₂ 220 l/s
    Pumping speed for He 255 l/s
    Pumping speed for N₂ 260 l/s
    Compression ratio for Ar > 1 · 10¹¹
    Compression ratio for CF₄ > 1 · 10¹¹
    Compression ratio for H₂ 9 · 10⁵
    Compression ratio for He > 1 · 10⁸
    Compression ratio for N₂ > 1 · 10¹¹
    Gas throughput at full rotational speed for Ar 7 mbar l/s
    Gas throughput at full rotational speed for CF₄ 8 mbar l/s
    Gas throughput at full rotational speed for He 20 mbar l/s
    Gas throughput at full rotational speed for H₂ > 14 mbar l/s
    Gas throughput at full rotational speed for N₂ 14 mbar l/s
    Fore Vacuum max. for N₂ 25 mbar
    Fore Vacuum max. for CF₄ 20 mbar
    Fore Vacuum max. for He 8.5 mbar
    Fore Vacuum max. for H₂ 20 mbar
    Fore Vacuum max. for N₂ 20 mbar
    Ultimate pressure with OnToolTM DryPump < 1 · 10-7 mbar < 5 · 10-10 mbar < 1 · 10-7 mbar
    Run-up time 1.8 min
    Ultimate pressure < 1 · 10⁻ hPa
    < 1 · 10⁻¹⁰ hPa
    Rotation speed ± 2 % 60,000 rpm
    Rotation speed: variable 20-100 %
    Sound pressure level ≤ 50 dB (A)
    Protection category IP 54
    Operating voltage 100-120/200-240 V AC, 50/60 Hz
    Operating voltage power supply 90-265 V AC
    Integral leak rate < 1 · 10⁻ mbar l/s
    Power consumption max. 300 W
    Current consumption max. 12.5 A
    Venting connection G 1/8"
    Weight 6.7 kg 8.7 kg 7 kg
    Cooling method, standard Water
    Cooling method, optional Air
    Cooling water temperature 15-35 °C
    Cooling water consumption 50 l/h
    Permissible magnetic field max. 5.5 mT
    Interfaces RS-485, Remote
    [이 게시물은 혜성테크놀…님에 의해 2020-06-25 17:21:38 specification에서 복사 됨]
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