OSAKA | TG1300M Pump Specification
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Writer 혜성테크놀… Date20-06-23 12:53 View 982 Comment0Related Links
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OSAKA
TG1300M Pump Specification
| Parameter | TG1300M | |||
|---|---|---|---|---|
| Flange | Inlet | VG200 | ISO-B200 | CF200 |
| Outlet | KF40 | |||
| Volume flow rate, L/S | N₂ | 1300 | ||
| N₂ (with protective screen) |
1230 | |||
| H₂ | 1200 | |||
| Max. compression ratio | N₂ | 1×10⁸ | ||
| H₂ | 1.5×10⁴ | |||
| Base pressure |
< 1×10-6 / < 1×10-7 Pa ( < 7.5×10-9 / < 7.5×10-10 Torr ) | |||
| Max. throughput N₂, sccm | 3000 | |||
| Startup time, min | 4 - 5 | |||
| Shutdown time, min | 4 - 5 | |||
| Max. backing pressure, Pa（Torr） | 500(3.8) | |||
| Recommended backing vacuum pump, L/min |
≧ 250 | |||
| Weight, kg | 34 / 42 | |||
| Turbo Controller | TC010MA | |||
