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  • OSAKA | TG1300M Pump Specification

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    Writer 혜성테크놀… Date20-06-23 12:53 View 1,483 Comment0

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    OSAKA

    TG1300M Pump Specification


    Parameter TG1300M
    Flange Inlet VG200 ISO-B200 CF200
    Outlet KF40
    Volume flow rate, L/S N₂ 1300
    N 
    (with protective screen)
    1230
    H₂ 1200
    Max. compression ratio N₂ 1×10⁸
    H₂ 1.5×10⁴
    Base pressure
    < 1×10-6 / < 1×10-7 Pa
    ( < 7.5×10-9 / < 7.5×10-10 Torr )
    Max. throughput N₂, sccm 3000
    Startup time, min 4 - 5
    Shutdown time, min 4 - 5
    Max. backing pressure, Pa(Torr) 500(3.8)
    Recommended backing
    vacuum pump, L/min
    ≧ 250
    Weight, kg 34 / 42
    Turbo Controller TC010MA
    [이 게시물은 혜성테크놀…님에 의해 2020-06-23 14:45:57 specification에서 복사 됨]
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