VARIAN | TwisTorr 74 FS Pump Specification
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Writer 혜성테크놀… Date20-06-23 10:55 View 2,410 Comment0Related Links
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VARIAN
TwisTorr 74 FS Pump Specification
| Parameter | TwisTorr 74 FS | ||||
|---|---|---|---|---|---|
| Pumping speed | KF40 | CFF 2.75” | ISO 63 | CFF 4.5” | |
| N₂ | 44 L/s | 50 L/s | 60 L/s | 60 L/s | |
| He | 33 L/s | 40 L/s | 54 L/s | 54 L/s | |
| H₂ | 28 L/s | 31 L/s | 42 L/s | 42 L/s | |
| Ar | 40 L/s | 51 L/s | 59 L/s | 59 L/s | |
| Max Gas Throughput | Air Cooling (35°C ambient temperature) |
Water Cooling (25°C water temp. / 35°C ambient temp.) | |||
| N₂ | 130 sccm | 130 sccm | |||
| Ar | 80 sccm | 80 sccm | |||
| Backing pump 5 m3/h | |||||
| Compression ratio and foreline tolerance |
N₂ | 1.0 x 10⁹ | >12 mbar | ||
| He | 2.0 x 10⁵ | >10 mbar | |||
| H₂ | 1.0 x 10⁴ | >04 mbar | |||
| Ar | > 1.0 x 10⁹ | >14 mbar | |||
| Foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100, estimated in water cooling mode | |||||
| Base pressure with recomm. forepump | < 5 x 10-10 mbar (< 3.75 x 10⁻¹⁰ Torr) | ||||
| Inlet flange | KF 40, ISO 63, CFF 4.5”, CFF 2.75” | ||||
| Foreline flange | KF16 NW | ||||
| Rotational speed | 70000 rpm (1167 Hz driving frequency) | ||||
| Start-up time | < 2 minutes | ||||
| Recommended forepump | Agilent DS 40M / DS 102 Rotary Vane Pump Agilent IDP-3/IDP-7 Dry Scroll Pump | ||||
| Cooling requirements | Natural air convection Forced air or water optional | ||||
| Operating position | Any | ||||
| Oper. ambient temp. | +5 °C to +35 °C | ||||
| Rel. humidity of air | 0 - 90 % (not condensing) | ||||
| Bakeout temp. | 80 °C for ISO (120 °C for CFF) at inlet flange | ||||
| Lubricant | permanent lubrication | ||||
| Cooling requirements | |||||
| Air cooling | Forced air (5-35 °C ambient temp.) Air flow temperature +5° C to +35 °C | ||||
| Water cooling | Water temperature from +15°C to +25°C Water flow min. 65 L/h | ||||
| Noise Pressure level (at 1 mt at full speed) |
40 dB(A) | ||||
| Storage temp. | -40 °C to +70 °C | ||||
| Max altitude | 3000 m | ||||
| Weight kg (lbs) | ISO 63 | 2.05 (4.50) | |||
| CFF 4.5” | 3.50 (7.70) | ||||
| CFF 2.75” | 3.34 (7.35) | ||||
| KF 40 | 2.37 (5.22) | ||||
