Turbo Pump Repair Vacuum Gauge Repair

  • SHIMADZU | TMP-1003 series Specification

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    Writer 혜성테크놀… Date20-06-22 14:23 View 1,571 Comment0

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    SHIMADZU

    TMP-1003 series Specification


    Parameter TMP-1003M TMP-1003MC  TMP-1003LM  TMP-1003LMC
    Suitable Power
    supply unit
    EI-D1003M
    Cooling
    method
    Cooling fan Water
    Ultimate
    pressure
    10 Pa order 10 Pa order 10 Pa order 10 Pa order
    Maximum allowable
    inlet 
    pressure
    (Nitrogen gas)
    1.3 Pa 400 Pa
    Maximum allowable
    outlet 
    pressure
    40 Pa 630 Pa
    Pumping speed nitrogen 1080 L/s
    helium 930 L/s
    hydrogen 790 L/s
    Compression ratio nitrogen 1 × 10 or more
    helium 8 × 10⁴
    hydrogen 4 × 10³
    Rated speed 35000 rpm
    Start-up time 5 minutes or less
    Mounting position In any desired direction
    Bake-out
    temperature
    at an inlet flange
    120 ℃ or less
    Vibration level
    (by Shimadzu's
    method)
    0.01μm or less (0-peak)
    Inlet flange ICF203
    Outlet flange KF40
    Mass 32 kg or less
    Admissible
    throughput of
    purge gas
    20 to 30 mL/min
    Admissible
    pumping speed
    of 
    backing vacuum
    pump in case of
    gas purge
    500 L/min or more
    Admissible
    ambient
    magnetic
    field
    Radial direction 3 mT
    Axial direction 15 mT
    Water Flow rate N/A 1 to 3 L/min
    Pressure 0.2 to 0.5 MPa
    Temperature 5 to 30 ℃
    [이 게시물은 혜성테크놀…님에 의해 2020-06-22 16:23:28 specification에서 복사 됨]
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