VARIAN | TV300HT Pump Specification
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Writer 혜성테크놀… Date20-06-16 15:56 View 998 Comment0Related Links
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VARIAN
TV300HT Pump Specification
| Parameter | TV300HT | ||||
|---|---|---|---|---|---|
| Pumping speed | With CFF 8" or ISO 160 | With CFF 6" or ISO 100 | |||
| N₂ | 280 l/s | 250 l/s | |||
| He | 230 l/s | 220 l/s | |||
| H₂ | 210 l/s | 220 l/s | |||
| Compression ratio | N₂ | >2 x 10⁸ | |||
| He | 1 x 10⁵ | ||||
| H₂ | 2 x 10⁴ | ||||
| Base pressure |
* with recommended mechanical forepump: < 2 x 10⁻¹⁰ mbar (< 1.5 x 10⁻¹⁰ Torr) * with recommended diaphragm forepump: 2 x 10⁻⁸ mbar (1.5 x 10⁻⁸ Torr) | ||||
| Inlet flange | CFF 8" O.D. ISO 160 CFF 6" O.D. ISO 100 | ||||
| Foreline flange | KF 25 NW | ||||
| Rotational speed | 56000 rpm | ||||
| Start-up time | < 3 minutes | ||||
| Recommended forepump | mechanical: Varian SD 300 | ||||
| diaphragm: Varian MD 60 | |||||
| Operating position | Any | ||||
| Cooling requirements | Natural air convection Forced air or water optional | ||||
| Operating ambient temperature | + 5° C to + 35° C | ||||
| Cooling water | flow: 200 l/h (0.89 GPM) temperature: + 10° C to + 30° C pressure: 3 to 5 bar (45 to 75 Psi) | ||||
| Bakeout temperature | 120° C at inlet flange max.(CF flange) 80° C at inlet flange max.(ISO flange) | ||||
| Vibration level (displacement) | < 0.01 μm at inlet flange | ||||
| Lubricant | permanent lubrication | ||||
| Storage temperature | - 20° C to + 70° C | ||||
| Weight kg (lbs) | ISO 100 and 160: 4.5 (10) | ||||
| CFF 6" and 8": 8 (17.6) | |||||
