Turbo Pump Repair Vacuum Gauge Repair

  • VARIAN | TV300HT Pump Specification

    About page

    Writer 혜성테크놀… Date20-06-16 15:56 View 1,503 Comment0

    Text

    VARIAN

    TV300HT Pump Specification


    Parameter TV300HT
    Pumping speed
    With CFF 8" or ISO 160 With CFF 6" or ISO 100
    N₂ 280 l/s 250 l/s
    He 230 l/s 220 l/s 
    H₂ 210 l/s 220 l/s
    Compression ratio N₂ >2 x 10⁸
    He 1 x 10⁵
    H₂ 2 x 10⁴
    Base pressure
    * with recommended mechanical forepump:
        < 2 x 10¹⁰ mbar (< 1.5 x 10¹⁰ Torr)

    with recommended diaphragm forepump:
        2 x 10⁻⁸ mbar (1.5 x 10⁻⁸ Torr)
    Inlet flange CFF 8" O.D.
    ISO 160
    CFF 6" O.D.
    ISO 100
    Foreline flange KF 25 NW
    Rotational speed 56000 rpm 
    Start-up time < 3 minutes
    Recommended forepump mechanical: Varian SD 300
    diaphragm: Varian MD 60
    Operating position Any
    Cooling requirements Natural air convection
    Forced air or water optional
    Operating ambient temperature + 5° C to + 35° C
    Cooling water flow: 200 l/h (0.89 GPM)
    temperature: + 10° C to + 30° C
    pressure: 3 to 5 bar (45 to 75 Psi)
    Bakeout temperature 120° C at inlet flange max.(CF flange)
    80° C at inlet flange max.(ISO flange)
    Vibration level (displacement) < 0.01 μm at inlet flange
    Lubricant permanent lubrication
    Storage temperature - 20° C to + 70° C
    Weight kg (lbs) ISO 100 and 160: 4.5 (10)
    CFF 6" and 8": 8 (17.6)
    [이 게시물은 혜성테크놀…님에 의해 2020-06-18 09:09:53 specification에서 복사 됨]
    문의하기