EDWARDS | STP-A1603C Specification
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EDWARDS
STP-A1603C Pump Specification
| Parameter | STP-A1603C | ||
|---|---|---|---|
| TMS unit |
Without TMS | ||
| Flange
size |
Inlet port flange | VG200/ISO200F/ISO250 | |
| Outlet port flange | KF40 | ||
| Purge port flange | KF10 | ||
Pumping speed (L/s) (see chapter 7.1) |
N₂ | 1600 | |
| H₂ | 1200 | ||
| Compression ratio | N₂ | >10 ⁸ | |
| H₂ | 7×10 ³ | ||
| Allowable maximum
continuous flow rate (sccm) |
N₂ | 2500 | |
| Ultimate pressure | 10 ⁻⁷ order (10 ⁻⁹ Torr order) Pa | ||
| Allowable maximum backing pressure | 266 (2 Torr) Pa | ||
| Enable exhaust gas | Chlorine and Fluorine gas can be used. When you want to use the
following gas, pleae contact Edwards.
- The gas including alkali metal, but except “Li”. - The gas including “Ga”, “Hg”, “In” and “Sn”. - HBr | ||
| Purge gas flow rate | 20 to 50 (see chapter 2.2.2) sccm | ||
| Back pump size | > 1300 L/min | ||
| Rated speed | 36,500
Rpm (Allowable speed range: 18,000 to 36,500) | ||
| Starting time | 7 min | ||
| Stopping time | 9 min | ||
| Baking temperature | <120 °C | ||
| Lubricating oil | Not necessary | ||
| Installation position | Free | ||
| Cooling method | Water cooling | ||
| Water Cooling | Flow rate | 2 L/min | |
| Temperature | 5 to 25 °C | ||
| Pressure | < 0.3 MPa | ||
| Water cooling fitting | Size | Rc 1/4 (ISO standard) | |
| Material | Stainless steel | ||
| Mass | 35 kg | ||
| Dimension | See chapter 7.3 Pump Overview Chart | ||
| Ambient air temp. range | 0 to 40 °C | ||
| Storage temp. range | -25 to 55 °C | ||
| Connection cable length | 30 m (maximum) | ||
