SHIMADZU | TMP-3203 series Specification
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SHIMADZU
TMP-3203 series Specification
| Parameter | TMP-3203M | TMP-3203MC | TMP-3203LM | TMP-3203LMC | ||
|---|---|---|---|---|---|---|
| Cooling method | Cooling fan | Water | ||||
| Ultimate pressure | 10⁻⁹ Pa order | 10⁻⁸ Pa order | 10⁻⁹ Pa order | 10⁻⁸ Pa order | ||
| Maximum Argon gas through put |
250 mL/min | 400 mL/min | 1200 mL/min | 2200 mL/min | ||
| Maximum allowable inlet pressure (Nitrogen gas) |
0.4 Pa | 40 Pa | ||||
| Maximum allowable outlet pressure |
40 Pa | 270 Pa | ||||
| Pumping speed | nitrogen | 3200 L/s | ||||
| helium | 3000 L/s | |||||
| hydrogen | 2400 L/s | |||||
| Compression ratio | nitrogen | 1 × 10⁹ or more | ||||
| helium | 3 × 10⁵ | |||||
| hydrogen | 1 × 10⁴ | |||||
| Rated speed | 21,000 rpm | |||||
| Start-up time | 13 minutes or less | |||||
| Mounting position | In any desired direction | |||||
| Bake-out temperature at an inlet flange |
120 ℃ or less | |||||
| Vibration level (by Shimadzu's method) |
0.01μm or less (0-peak) | |||||
| Inlet flange | VG350 | |||||
| Outlet flange | KF40 | |||||
| Mass | 70 kg | |||||
| Admissible throughput of purge gas |
20 to 30 mL/min | |||||
| Admissible pumping speed of backing vacuum pump in case of gas purge |
1500 L/min or more | |||||
| Environmental Temperatures | Operation : 0 to 40 ℃ Storage : -25 to 70 ℃ | |||||
| Admissible ambient magnetic field |
Radial direction | 3 mT | ||||
| Axial direction | 15 mT | |||||
| Water | Flow rate | N/A | 2 to 4 L/min | |||
| Pressure | 0.2 to 0.5 MPa | |||||
| Temperature | 5 to 25 ℃ | |||||
