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LEYBOLD | TMP361 series Specification

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LEYBOLD TMP361 Series Specification

Parameter TMP361 TMP361C
High-vacuum port 100 ISO-K
100 CF
nom. diam.
160 ISO-K
160 CF
nom. diam.
100 ISO-K
nom. diam.
160 ISO-K
nom. diam.
Pumping speed for N 345 l/sec 400 l/sec 345 l/sec 400 l/sec
Ultimate pressure < 10⁻¹⁰ mbar
Forevacuum pressure 0.5 mbar
Recommended forevacuum
Pump
D 16 B TRIVAC D 25 B TRIVAC
Recommended frequency
converter
20 NT
Speed 45,000 rpm
Run-up time  approx. 2 min
Coolant connection nozzle 10 mm
Coolant temperature 10 – 25 °C
Coolant flow rate
at 15 °C
20 l·h¹
Forevacuum port 25 KF nom. diam.
Purge gas port - 10 KF nom. diam.
Vent port 10 KF nom. diam.
Weight approx. 12 kg
Max. ambient temperature
at operation
55 °C
Max. bakeout temperature
at CF flange
100 °C  -
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