ULVAC | UTM-3303FH Pump Spacification
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ULVAC
UTM-3303FH Pump Specification
Parameter | UTM-3303FH | ||||
---|---|---|---|---|---|
Flange size | Inlet | JIS VG350 | |||
Outlet | NW40 | ||||
Pumping speed (L/s) | N₂ | 3300 | |||
H₂ | 2400 | ||||
Max. compression ratio | N₂ | > 10¹¹ | |||
H₂ | 9×10⁴ | ||||
Rotor blade surface treatment | Non | ||||
Max. pressure at inlet (at max. flow) |
N₂ | 9 | |||
Max. pressure at outlet (at max. flow) |
N₂ | 210 | |||
Max. flow rate of N2 *4 SCCM(Pa L/s) | 1800 (3030) | ||||
Max. flow rate of Ar*4 SCCM(Pa L/s) | 1100 (1850) | ||||
Ultimate pressure | 10⁻⁸ Pa | ||||
Rotational speed | 22,200 rpm | ||||
Acceleration/deceleration time | Approx. 12/16 min | ||||
Bearing type | Totally active magnetic bearings | ||||
Baking temperature | ≦ 120 ℃ | ||||
Cooling | Water | ||||
Cooling water port/ Flow rate of cooling water |
Rc 3/8/≧ 3 L/min | ||||
Pressure drop of cooling water between inlet and outlet |
≧0.05 MPa | ||||
Weight | Approx. 86 kg | ||||
Recommended backing vacuum pump |
1500 L/min | ||||
Noise level | 55 dBA | ||||
Torque at Rotor destruction | 2.3×10⁴ N・m | ||||
Motor drive system | Control Unit | VVVF | |||
Output frequency | 370 Hz | ||||
Power consumption | 1.6 kVA | ||||
Input voltage | 200 ~ 240±10% ACV | ||||
Input frequency | 50/60 Hz | ||||
Phase | Single | ||||
Ambient temperature | 0 ~ 40 ℃ | ||||
Weight | Approx. 10 kg |